MEMS (Paperback)

MEMS
MEMS are small and integrated devices, which combine electronics, electrical as well as mechanical elements to meet the control related functional requirements. This book synergistically covers the aspects of multidisciplinary subjects by providing the proof-of-principle, concepts, design, development and applications of MEMS. Key features Principles in MEMS and its scope discussed in sequence ? will help the students grasp the basics (Chapter 1) Various fabrication and design processes such as lithography, surface micromachining, bulk micromachining, etching, thin film deposition, doping, wafer bonding are discussed with their methods and techniques in the chapter on Micromachining (Chapter 2 ) Fundamental components used for design of MEMS are discussed in the chapter on Mechanical Sensors and Actuators (Chapter 5) Thermal MEMS such as Thermocouple, RTD, MEMS thermal probe, microhotplate, thermovessels, SMA actuators, U-shaped horizontal and vertical actuator are covered in chapter on Thermal Sensors and Actuators. (Chapter 6) Biomedical and Chemical MEMS with discussions on chemicals used in BioMEMS and devices like DNA Sensors are present in chapter on Micro fluidic Systems. (Chapter 10) Chapter on Performance Indices and Device Array is dedicated to he understanding of micro devices (Chapter 14) Pedagogy : 227 Practice questions 267 Diagrams 45 Design examples Principles in MEMS and its scope discussed in sequence ? will help the students grasp the basics (Chapter 1) Fundamental components used for design of MEMS are discussed in the chapter on Mechanical Sensors and Actuators (Chapter 5) Biomedical and Chemical MEMS with discussions on chemicals used in BioMEMS and devices like DNA Sensors are present in chapter on Micro fluidic Systems. (Chapter 10)